起订量:
MP-20 薄膜测厚仪
免费会员
基本规格 | ||||
精度 | 准确度 | 稳定性 | 光斑大小 | 样品尺寸 |
0.1Å or 0.01% (greater of) | 0.2% or 10A (greater of) | stability 0.2A or 0.02% (greater of) | 2mm standard (optional to 20µm) | from 4mm |
s.d. of 100 thickness reading of 100nm SiO2/Si calibration sample | filmstack dependent | 2 sigma over 20 days (100 measurements daily) on 100nm/Si calibration sample | ||
系统参数 | ||||
型号 | 波长范围(nm) | 光谱仪/探测器 | 光源 | 厚度 |
Vis | 400-1100 | Spectrometer F4/Si CCD 3600 pixels/ ADC- 16 bit | Tungsten-Halogen | 15nm- 75µm |
UVVisSR | 200-1100 | Spectrometer F4/Si CCD 2048 pixels/ ADC- 16 bit | Deuterium/Tungsten-Halogen | 1nm-75µm |
HRVis | 700-1000 | Spectrometer F4/Si CCD 2048 pixels/ ADC- 16 bit /resolution | Tungsten-Halogen | 1µm-400µm |
UVVis-RT | 200-1000 | F4/Si CCD 2048 pixels/ ADC 16 bit/Optical Switch(Reflectance & Transmittance) | Tungsten-Halogen | 1nm-75µm |
NIR | 900-1700 | F2 Spectrometer InGaAs CCD 512 pixels: ADC- 16 bit | Tungsten-Halogen | 50nm- 85µm |
VisNIR | 400-1700 | Two spectrometer channels/ detectors (F4 Si 3600 pixels CCD and F2 InGaAs 512 pixels PDA) /ADC- 16 bit | Tungsten-Halogen | 10nm- 85µm |
UVVis-NIR | 200-1700 | Two spectrometer channels/ detectors (F4 Si 3600 pixels CCD and InGaAs 512)/ ADC – 16 bit | Deuterium/Tungsten-Halogen | 1nm-85µm |
VisXT | 800-870 | F4 spectrometer/Si 2048 pixels CCD | Tungsten-Halogen | 10µm-1400 µm |