起订量:
安徽合肥市HORIBA MFC气体流量控制器N2流量计SEC-N112
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INFICON 皮拉尼PSG500、PSG502-S、PSG510-S 和 PSG512-S型标准真空计采用当今市场上的数字皮拉尼技术。 不锈钢传感器单元坚固耐用,结构设计紧凑,适用于半导体系统和标准应用,例如前级真空管。
益处
类型
PSG500 tungsten | PSG500-S tungsten, setpoints | PSG502-S nickel, setpoints | PSG510-S tungsten, setpoints, ceramic feedthroughs | PSG512-S nickel, setpoints, ceramic feedthroughs | ||
测量原则 | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | |
精度 (N2) | ||||||
1 x 10-3… 100 毫巴 | % of reading | ±15% | ±15% | ±15% | ±15% | ±15% |
5 x 10-4… 1 x 10-3 毫巴 | % of reading | ±50% | ±50% | ±50% | ±50% | ±50% |
100 … 1000 毫巴 | % of reading | ±50% | ±50% | ±50% | ±50% | ±50% |
可重复性(空气) | ||||||
1 x 10-3… 100 毫巴 | % of reading | 2% | 2% | 2% | 2% | 2% |
输出信号(测量信号) | ||||||
电压范围 | V | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 |
测量范围 | V | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 |
测量范围(空气、O2、CO、N2) | mbar | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 |
设定点 | ||||||
设定点数量 | 2 | 2 | 2 | 2 | ||
设置范围 | mbar | ‒ | 2 x 10-3 … 500 | 2 x 10-3 … 500 | 2 x 10-3 … 500 | 2 x 10-3 … 500 |
滞后 | % of reading | ‒ | 10% above lower threshold | 10% above lower threshold | 10% above lower threshold | 10% above lower threshold |
继电器触点 | V (dc) A (dc) | ‒ | 30 | 30 | 30 | 30 |
继电器触点: 转换时间 | ms | ‒ | <20 | <20 | <20 | <20 |
电源电压 | ||||||
真空计上 | V (dc) | +14 …+30 | +14 …+30 | +14 …+30 | +14 …+30 | +14 …+30 |
波纹 | V (p-p) | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
电压与压强 | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | |
内部容积 | ||||||
DN 16 ISO-KF,DN 16 CF-R,7/16-20 UNF | cm³ (in.³) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) |
DN 16 ISO-KF & DN 16 CF-R 长管 | cm³ (in.³) | 10 (0.61) | 10 (0.61) | 10 (0.61) | 10 (0.61) | 10 (0.61) |
1/8'' NPT,4 VCR,8 VCR,1/2'' 管 | cm³ (in.³) | 2 (0.122) | 2 (0.122) | 2 (0.122) | 2 (0.122) | 2 (0.122) |
容许温度 | ||||||
运行 | °C | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 |
真空连接 (1) | °C | 80 / 250 (2) | 80 / 250 (2) | 80 / 250 (2) | 80 / 250 (2) | 80 / 250 (2) |
贮存 | °C | -20 … +65 | -20 … +65 | -20 … +65 | -20 … +65 | -20 … +65 |
重量 | ||||||
DN 16 ISO-KF,7/16-20 UNF | g | 80 | 80 | 80 | 80 | 80 |
DN 16 CF-R,4 VCR | g | 100 | 100 | 100 | 100 | 100 |
1/8'' NPT,1/2'' 管 | g | 70 | 70 | 70 | 70 | 70 |
8 VCR,DN 16 ISO-KF 长管 | g | 130 | 130 | 130 | 130 | 130 |
DN 16 CF-R 长管 | g | 140 | 140 | 140 | 140 | 140 |
错误信号 | V | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) |
输出电阻 | Ω | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 |
*小负载电阻 | kΩ | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof |
反应时间 | ms | 80 | 80 | 80 | 80 | 80 |
真空计识别 | kΩ | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common |
调整 | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | |
电流消耗 | mA | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) |
功耗 | W | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
电气连接 | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | |
传感器电缆 | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | |
电缆长度 | m | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) |
暴露于真空的材料 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 | |
单丝 | W | W | Ni | W | Ni | |
容许压力 | bar (absolute) | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases |
安装定位 | any | any | any | any | any | |
保护等级 | IP40 | IP40 | IP40 | IP40 | IP40 |