IS200EPDMG1B

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ITCC。高速旋转设备的控制，如汽轮机组控制，空压机控制，高炉鼓风机控制。甚至涡轮发动机控制，燃气轮机控制是另外的概念。例如Triconex的控制器，除了能做 ESD，F&GS 外，还能做 ITCC。  做ESD，F&GS 等 SIS概念下的系统，是要认证的，是必须有TUV的SIL等级证书的。 而做ITCC的，则不是必需要，TUV的认证。   同一家的同一个东西，用在不同的场合，有不同的用途，所以有不同的叫法。  同样的道理，你的银子极其的多，你可以用 Triconex的系统来做PLC，或者小DCS 来用。 这时候，你还可以管 triconex  叫PLC，或者DCS，，，都可以的。  CCC是做 ITCC，不做ESD；  横河，Emerson的安全系统则基本上只做ESD，F&GS,不做ITCC。  Triconex是即做ESD，又做ITCC。  SIS safety instrument system 安全仪表控制系统   ESD Emergency shutdown 在石化一般叫ESD。在高压管线上叫HIPPS，在锅炉上叫FSSS，在汽机上叫ETS。

厦门仲鑫航自动化设备有限公司
Xiamen Zhong Xinhang automation equipment Co., Ltd.

欧阳英（）
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：370848070
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Add：厦门思明区湖滨东路湖光大厦8楼A单元

DCS集散式控制系统、PLC可编程控制器、数控系统、
(CPU处理器、模块、PLC卡件、控制器、伺服驱动器、电源，机器人备件等)欧美品牌产品

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3152223-003 Y, 1140-01088/ MDX-20K MASTER/ AMAT 

660-021964-001,3155036-006/ RF MATCH NETWORK AE / LAM RESEARCH

3152012-043 Z, 47230 F/R MDX-10 Slave Advanced Energy

27-115617-00, 3155051-015A , RFG 5500 GENERATOR,HIGH FREQ. W/SETPOINTRACK, AE

3155083-130, 0190-22080/ HFV-8000/ AMAT

2012-041-AA MDX-10K Master Advanced Energy

3155083-130, 0190-22080/ HFV-8000/ AMAT

3155031-036 A, 0190-11225 / UNIT R BIAS MATCH /ADVANCE ENERGY

3156114-006, 0920-00139 / APEX 3013 RF GENERATOR REV. A / ADVANCED ENERGY

3155038-004A RFG-3000 ADVANCED ENERGY 

3156012-002 / PDP-2500 ICP GENERATOR/ADVANCED ENERGY  

OPT-100Z-00, 0190-26736  / DCG-200Z OPTIMA/ MKS

853-021957-011, 660-021964-001, 3144036-006 / 4520i CHAMBER/ LAM

PDX-900-2V GENERATOR MF RF 900W 350KHZ, 3156024-132

3153109-002 ,0190-13321/ POWER SUPPLY R E-CHUCK/ ADVANCED ENERGY

3150076-001 / LF-10WC, RF GENERATOR, LOW FREQUENCY, 1KW (G19-10074-00)/AE 

AMAT 20Kw Pinnacle Supply MDX PINNACLE, MODEL NO. 3152412-243 0190-25689

3156113-014 AE APEX 2013, RF GENERATOR, 660-063437-002E

27-130951-00, 3150274-004 / B SE RF MATCH (13.56MHZ)/ ADVANCED ENERGY

3150262-000/ ATLAS 2012 DPS+SOURCE RF GENERATOR/ ADVANCED ENERGY

 VM1000A /  RF MATCH AE OR DESSLER / ADVANCED ENERGY

3150017-028, 7520758050 /RF GENERATOR RFPP LF 30S/ ADVANCED ENERGY

3150014-003 /  GENERATOR,RF,1KW,13.56 MHZ REWORKED RF-10S /ADVANCED ENERGY 

PDX-900-2V GENERATOR MF RF 900W 350KHZ, 3156024-132

R27-156757-00, 3156043-204/ PDX 5000, REV A, RF GENERATOR;/ NOVELLUS

3152194-008 / MDX-L10 SLAVE DELTA/ ADVANCE ENERGY

27-250801-00, 3156048-200B/ PDX 8000 LOW FREQUENCY GENERATOR,340-440KHZ/ AE

3156110-214, 660-032596-214/ APEX 1513/ ADVANCED ENERGY

5027-003-B / ADVANCED ENERGY  RFG-1250

4096800 /POWER SUPPLY HIGH ENERGY QUAD LENS/ VARIAN/GLASSMAN

3152012-043 Z, 47230 F/R MDX-10 Slave Advanced Energy

3155038-004C,1908570 REV C. RFG-3000 ADVANCED ENERGY

4096900/PS ER30N10.OXR9/POWER SUPPLY HE QUAD NEG RFM/ GLASSMAN 

2012-041-AA MDX-10K Master Advanced Energy

660-024367-008, 3155027-008J  RFG-1250 ADVANCED ENERGY

CX-600AS,  (0190-2175 /  RF GENERATOR 600W 13.56 MHZ  FP3113RG/COMDEL

95-2992 / POWER SUPPLY GASONICS  MWAVE PWR / GASONICS

3152412-233 0190-25724-001 PINNACLE POWER SUPPLY ADVANCED ENERGY  

FP1248R2, 0190-07556 ,COMDEL CLX1000 AMAT

1140-90179 / SOURCE SUPP POWER SUPPLY OL10000/103/04/ ADVANCE HI-VOLT

 (0190-21755) FP3113RB COMDEL CX-600A/S  RF GENERATOR 600W 13.56 MHZ

1140-90179 / SOURCE SUPP POWER SUPPLY OL10000/103/04/ ADVANCE HI-VOLT

0190-70099, FP0213RK, CPS1000 COMDEL 13.56MHZ 

3156043-104A, 27-113711-00, PDX-5000 POWER SUPPLY ADVANCED ENERGY

00473696, EMS POWER SUPPLY (LAMBDA) EMS

CPS-500AS,0190-13320 / 13.56 MHZ RF POWER SUPPLY/COMDEL

CPS-500AS,0190-13320 / 13.56 MHZ RF POWER SUPPLY/COMDEL

710-400161-00 / KLA KLA TENCOR WAFER SENSOR PCB BOARD ASSY NR. :710-400161-00;

710-404420-00 / KLA-TENCOR I/O BOARD 073-404423-00 710-404420-00

OP5240 / THERMA-WAVE 5240 BPR, BPE, DUV, AE, SE OPTI-PROBE / KLA-TENCOR 

780-13164-000 /Z STAGE, PIEZO ASSY / KLA-TENCOR

68805-KLA / KLA ORIEL ILLUMINATOR POWER SUPPLY KLA

28000BFM / KLA LAMBDA POWER SUPPLY KLA 5200

820-19059-000 / HARDWARE CONTROL INTERFACE PCB/ KLA TENCOR

710-401536-00 / KLA PCB ENCODER INTERFACE BOARD KLA 5200

LFS-47-48 / KLA LAMBDA POWER SUPPLY LFS

ESC-212-KLA-UNI /  ESC-212 CONTROLLER/  BROOKS AUTOMATION

720-14688-00, WIEN FILTER CONTROLLER CHASSIS KLA-TENCOR 

KLA -EV300/ E- GUN AND COLUMN ASSEMBLY/ KLA-TENCOR

710-658051-20 /PCB MASS MEMORY 2 PHASE/  KLA

ABBGA0003000, MODEL CHE-34-2 C5014-00629-1 KOMATSU

002-7800-005, 750-614043-000 /WAFER LOAD PORT - KLA / BROOKS AUTOMATION

710-650099-20, PCB, DIGITAL PROCESSOR KLA

MCB-K050 / PCB /KLA-TENCOR   

710-689987-00 KLA VIF2 ASSY PCB KLA 8100 2138

KIT, REPLACE, X-Y STG, SCHNEEBERGER 780-08148-000

471-08424-000, PRE-2842, PREALIGNER SIMILAR TO EQUIPE PRE-200 KLA 8100

AP DRIVE/DETECTOR (8100) 780-05458-001

WAFER PLATE 780-10323-000

720-19321-001 / DEFLECTION AMPLIFIER BOX /KLA TENCOR CORP

750-693047-002 /IMMECOR DUAL PENTIUM RAID IPC CE400/ KLA-TENCOR CORPORATION

720-450025-00 / KLA KLA 5200 ILLUM ASSEMBLY ORIEL 66330-KLA POWER SUPPLY KLA

073-400362-00 / KLA BACK PLANE MOTHER BOARD COMPLETE KLA 5200

710-655651-20 / CORNERTURN 3 PCB / KLA-TENCOR

720-05721-000 / KLA 8100X COLUMN CONTROL CHASSIS / KLA TENCOR

820-18119-000 / GAUGE INTERLOCK PCB/ KLA TENCOR CORP

750-400159-00 KLA-TENCOR DIGITIZER,MATROX VIP 1024

710-689987-00,   KLA VIF2 ASSY PCB KLA-TENCOR

7315-A3-01, 0046190-001 / KLA QUANTOX SYSTEM COMPUTER / KONTRON

710-404556-00 / KLA KLA 5200 MOTOR DRIVER BOARD 073-404555-00

720-06888-000 /FOCUS CONTROL BOARD CHASSIS, KLA CUSTOM 81XX/KLA-TENCOR  

710-658807-00 /KLA VIF 2 PCB (for 2139 Series) /  KLA-Tencor
0190-76028, OEM-12B3, GENERATOR 3 PHASE, RF ENI

OEM-650A-02/ RF GENERATOR/ ENI

GW2502MA-B1C001-L2, 660-110685-012,/ GMW-25, RF GENERATOR, 2500W/ ENI

GHW-12Z-13DF2NH-001/ GHW-12Z /  ENI

MWD-25LD-02/ ENI  RF MATCH REV C/ w/RFC-6 MW/ CONTROLLER/ UNITY II

OEM-6A-11491-51, SOLID STATE POWER GENERATOR ENI

OEM-25B-01 REV.C , RF GENERATOR ENI

322703C/3 AXIS WAFER TRANSFER ROBOT/ AXCELIS

1169072 / INA 14344 UPD TO 1186940 ROTARY DR CONT 11S1547 P8 / AXCELIS

H1406006 WAFER, LIFTER, 150MM, SUMMIT AXCELIS (SET OF 2)

469431 AXCELIS TECHNOLOGIES INC WFR PAN-CERAMIC, EMBEDDED VAC

0125-7002 /PER4MER, SINGLE ARM WAFER ROBOT, CYBEQ 8000, 30-010-01/ IDE

2LA0497111, GB4P, ROBOT GENMARK GB4PM DUAL PADDLE

ATM-105-1-S-CE /WAFER HANDLING ROBOT WITH MODEL#DD-50 ARM/ PRI

4100-0039-049 EQUIPE TECHNOLOGIES, INC ROBOT

YR-CRJ3-A01 / YASKAWA  ROBOT MOTOMAN

TS520-C001S Kawasaki model robot DNS SK-2000 for coater/developer track

RORZE ROBOTS UST81126R ROBOT  SANYO DENKI MOTOR RR304L120 REFURBISHED 

ATM-407B-1-S , ROBOT, WAFER HANDLING,  BROOKS AUTOMATION, EQUIPE PRI.

XU-RC320M-A00 /ROBOT/XU-RC320M-A00 /YASKAWA

001-7600-07 /BROOKS MTR-5 ROBOT/ BROOKS AUTOMATION

0240-13274 / SPARES, E/C HP/HP MOTOR ASSY/ APPLIED MATERIALS

6-0002-1053-SP / SEZ SP/PRI ATM-407B-2-S-CE ROBOT 200MM/2200874/ BROOKS AUTOMATI

017-0950-01 or 121655 /  ROBOT RELIANCE SERIES, SIGL PADDLE,M WITH CASS MAPPING 

02-0000-06 Robot Brooks Automation Equipe. Pri

08001-A41-P11-W61-EJ1 /ROBOT INNOVATIVE ROBOTIC SOLUTIONS  

001-9918-01 robot controller brooks automation equipe pri

2LA0497111, GB4P, ROBOT GENMARK GB4PM DUAL PADDLE

980010622A1 /SYSTEM SMALL CONTROLLER/ GENMARK

062250167-01 ASM MODULE W/ GENMARK GB4P ROBOT

 TCU 40/80 / CHILLER HEAT EXCHANGER/ EDWARDS

RV5 EDWARDS ROUGHING  OIL WET PUMP

W95100028 /EDWARDS 4080 PLUS CHILLER HEAT EXCHANGER /EDWARDS VACUUM

 A52844433, NEW INTERFACE MODULE W/ CABLES EDWARDS

STP-XH2603P/  TURBO MOLECULAR PUMP/ EDWARDS

 1181-000431-12/  DIFUSION PCB ASSY,MC 31105A/ TOKYO ELECTRON

1D10-101965-12 / ELECTRODE BOTTOM C-ESC 88 DRM /TOKYO ELECTRON

 1181-000308-17 /PCB,ASSY,WAFER,COUNTER E6Z0058W/ TOKYO ELECTRON

1110-101829-21,TOKYO ELECTRON CAP NEW

ES1D10-090060-TM /COVER,BELLOWS,UPPER M/  TOKYO ELECTRON

MKS THROTTLE VALVE ( ALPHA 8S) 253B-12771-JSP027-93-071

TS-4000Z-16 /CTRL UNIT , W/ MC-31151 / TOKYO ELECTRON

DS043-001614-1/  HEATER 3TR0803 /  TOKYO ELECTRON

TF926719-001, 12-11192-5,CLEANSTREAM SOLID STATE COOLING SYSTEM,1100/H3000

1D10-204338-13 / UPPER ELECTRODE DRM / TOKYO ELECTRON AMERICA, INC

1181-000543-13 / PCB ASSY/ TOKYO ELECTRON

 SUR-10YISA SRC BUS RACK AND GUARD UNITY II VME MODEL 

DS049-000664-1, GP230-LG11-HT-E / DIGTL TERMINALS,COMM. TEACHING BOX  HANDY/

(118703210413)  RY UNIT (4), H021, APLHA 8S, MC-1106A, MC-3104A

1181-000310-1C /PCB ASSY WCIF/ TOKYO ELCTRON LIMITED

ES1D05-300184-11, 7MM FOCUS RING TOKYO ELECTRON

CT2985-407772-11, ARM ACT8 PINCETTE+BLOCK

1181-000537-15/  PCB ASSY MC 31106A/ TOKYO ELEC.

DS1110-205736-22 HEAT INSULATOR

1181-000182-14 /PCB ASSY / TOKYO ELECTRON

1181-000566-11 / PCB ASSY, MDIF-02A-2 / TOKYO ELECTRON

ES1D80-004121-25R, AMN30C11 /  RF MATCH / DAIHEN

1181-000393-18 /PCB ASSY 101F-01-1 SD4-S515 E760061W/

1181-000465-12 / MC-31109B -ALPHA 8S BOARD /TOKYO ELECTRON

1D10-101475-21 / PLATE. BAFFLE, 0-15, (DRM2)/TOKYO ELCTRON LIMITED  

1810-224912-11 /PLATE, COOLING UPPER (T10-215 D100-T1)/ TOKYO ELECTRON 

TOKYO ELECTRON 2110-334091-11 HEAT INSULATOR

1181-000253-1B / -ALPHA 8S BOARD MC-31044A / TOKYO ELECTRON

TOKYO ELECTRON 2181-020011-16 PCB ASSY STC-1/0

DS2185-034186-12, A31#2185-034186-12, MANIFOLD BDY.8SEN-L-MS TOKYO ELECTRON

1105-100361-12 / PEDESTAL QUARTZ FINNED WITH SPACER TOKYO ELECTRON 

CT2986-453420-11, MSM042A7F /  MOTOR, AC 12 PRA Z #01/ PANASONIC

TOKYO ELECTRON (LC750L(D) PC-120 (TORAY OXYGEN ANALYZER DS051-000487-1

ES1D05-300188-12 4002-099-0814 RING, INSULATOR (DRM)TOKYO ELECTRON 

1181-000257-17 /PCB ASSY MC 31043A/ TOKYO ELECTRON  

CS1B05-100530-12 / 200Z WAFER GUIDE QUARTZ SPM/  TOSOH

DS1187-094316-11, 76511 MANIFOLD TOKYO ELECTRON

2187-207323-15, MANIFOLD ASSEMBLY TOKYO ELEC.

CT2939-000009-12, MSE343B, POWER SUPPLY UPSTAIR ( ACT 8)

TOKYO ELECTRON 1181-000538-12 PCB ASSY MC-31107A D/OUT

TOKYO ELECTRON 2181-020010-17 PCB ASSY STC-P

1181-000053-16/  PCB ASSY MC-31010A / TOKYO ELECTRON

CT2980-092300-11 / TOB1015 CPC-T0015A-1 CHEMICAL I/O BOARD /TOKYO ELECTRON

DS1187-098042-18 / CTRL UNIT TS 4000Z-16/ TOKYO ELECTRON 

TOKYO ELECTRON 1181-000524-12 PCB ASSY MC-31137 A8S OPE

ES1D80-002210-11 SCCM OXIDE ALUMINUM DUMMY CASETTE

DS1187-027889-13 / T BAWL CTRL UNIT SUPPLY PACK / TOKYO ELECTRON

DS1187-027889-14 / T BAWL CTRL UNIT SUPPLY PACK / TOKYO ELECTRON

DS012-002973-1, 253B-4-100-2 / BUTTERFLY THROTTLE VALVE MKS / TOKYO ELECTRON

ES1D05-300188-12 / RING, INSULATOR (DRM)/ TOKYO ELECTRON

CT2980-092870-11R / TDK MSE181G INTERFACE BLOCK DC POWER SUPPLY / TOKYO ELECTRON

3M87-058595-11 / STAGE HEATER ASSY 300MM,(ELPR NS)/TOKYO ELCTRON LIMITED

CT2980-192017-11,JS2006FN509/  IRA AC 12" T MOTOR ASSY MU M016 MSM02A1FT/ NSK

CS011-001822-1,FF-20HT-E101  / PUMP,IWAKI, /  TOKYO ELECTRON

MWD-25LD-02/ ENI  RF MATCH REV C/ w/RFC-6 MW/ CONTROLLER/ UNITY II

STEC FI-1000 TOKYO ELECTRON STEC MFC CONTROLLER VERSION 1.3 DS015-007057-1

Gate Valve for Diffusion  DS2112-000081-11 CKD Gate Valve VEC-SH8G-X0102

ES1D80-003506-14,GEW3040MA-F2H00-01,RF GENERATOR 40.68MHZ ENI GENESIS

GEW3040MA-F2H00-01/ 3D80-000192-18 GEW-30A RF GENERATOR/ ENI