SMX-BEN  Benchtop XRF Metrology Tool（： 丁成峰）

Solar Metrology System SMX tools excel at process development and failure analysis, as well as intricate analysis of full-panel deposition gradients.
The SMX-BEN benchtop platform is an excellent choice for R&D, process development and failure analysis. SMX-BEN delivers applications versatility and unsurpassed measurement performance in a compact form factor.
SMX-BEN facilitates material selection and recipe formulation in a pre- or early production ramp phase, and will continue to support your SMX production tool platforms well into capacity production.

MIRA AnalysisTM is an integrated XRF analysis and process control suite. MIRA combines powerful analysis tools with an intuitive, easy to use operator interface that is consistent across all SMX tool platforms.