ERAVAC Sensor
                                                                                                   CTR 100
Technical Data
                                                                                   （Temperature Compensated）

Full Scale （FS） / Measurement range                                1 Torr / 1 x 10-4 - 1 Torr                        10 Torr / 1 x 10-3 - 10 Torr

                                                                                                                      100 Torr / 0.01 - 100 Torr

                                                                                                                     1000 Torr / 0.1 - 1000 Torr

                                                                        Pressure Units:                                      Pressure Units:

                                                              1 Torr = 1.33 mbar = 133 Pascal                     1 Torr = 1.33 mbar = 133 Pascal

Materials exposed to gases                             ceramic （Al O ）, stainless steel 316, Vacon 70      ceramic （Al  O ）, stainless steel 316, Vacon 70
                                                                   2  3                                                2  3

Max. overrange pressure                                     2000 Torr for 1/10/100 Torr sensors,                2000 Torr for 1/10/100 Torr sensors,

                                                              3000 Torr for 1000 Torr sensors                     3000 Torr for 1000 Torr sensors

Measurement uncertainty                                     0.2% of reading ± temperature effect               0.2% of reading ± temperature effect

Resolution                                                  0.003% of FS for 0.1/1 Torr sensors              0.003% of FS for 10/100/1000 Torr sensors

Temperature effects
    Zero coefficient                           %/°C                   0.015 of Full scale                                 0.005 of Full scale

    Span coefficient                           %/°C                     0.01 of reading                                     0.01 of reading

Response time                                     ms                          30                                                  30

Nominal temperatur range                           °C                      +5 to +50                                           +5 to +50

Supply voltage                                  V DC                      +14 to +30                                          +14 to +30

Power consumption                                  W                            1                                                   1

Signal Output                                       V                    0 - 10; linear                                      0 - 10; linear

Interface                                                                 0.26 （0.57）                                         0.26 （0.57）

Weight approx.                               kg （lbs）                      RS 232 C                                            RS 232 C

Dead Volume                                      cm3                            6                                                  6

Connection cable                                                          see section                                         see section

                                                           “Connection Cable for active Sensors”               “Connection Cable for active Sensors”

Calibration                                                  see section “Miscellaneous”, para.                  see section “Miscellaneous”, para.

                                                       “Oerlikon Leybold Vacuum Calibration Service”       “Oerlikon Leybold Vacuum Calibration Service”

                 1.1xF.S.

                 1.0xF.S.

                 0.9xF.S.

                 0.8xF.S.
            p
            e    0.7xF.S.
            r
            u    0.6xF.S.
            s
            s
            e
            r    0.5xF.S.
            P
                 0.4xF.S.

                 0.3xF.S.

                 0.2xF.S.

                 0.1xF.S.
                 0.0xF.S.