APC 蝶阀-DeviceNET通讯界面设置
1. 阀
2. 处理室
3. 进气口
4. 压力传感器
5. 传感器线
6. 控制器和执行器
7. 连接遥控控制器
8. 连接电源线
9. 真空泵
APC 蝶阀剖面-DeviceNet
主要应用
真空压力控制和隔离阀门
应用产业
>> SEMI - 半导体
>> FPD - 光电面板
>> CVD - 化学气相沉积
>> Solar - 太阳能
DeviceNet通讯界面
规格
>> 非常快速准确的压力控制
>> 阀门位置控制
>> 备用电源：有，用于停电时关闭阀门。
>> 传感器电源：24V DC 和±15V DC 均有
>> 2 个线性传感器或仿真线性物理量的输入
>> 仿真量和数字控制
>> 环境温度：≤ 70°C max.（控制器部分-24HR）
>> 远程控制（供客户选择）
>> 阀门可由主机（本地控制）通过RS232控制； 用于初始调整。
>> 状态和位置以绿色4位亮数字显示。
Model | Connection | Connection Type |
Power | Power input | DB-9 male |
Sensor
(Vacuum Gauge) | Sensor input/
Sensor power supply | DB-15 female |
Interface | DeviceNET | M-12 male |
Digital I/O | DI/DO | M-8 male |
Node Address | Address/ Baud rate | 8pin DIP switch |
Service | APC service | Mini USB female |
Monitor | Show status | Green LED display |
DeviceNet通讯界面的APC 软件功能
使用APC软件计算机控制提供便利操作功能
- 设定控制调整参数：GAIN
- 压力和位置控制模式
- 附表测试模式=> 1 cycle schedule
- 设置阀打开/关闭速度
- 记录APC HW/SW 版本, 序列号和型号
- 记录阀门循环和运行时间
- 设置公差范围的压力
- 循环寿命和压力控制记录
- 控制器参数上传和下载
- 断电保护功能
- 压力学习功能
APC蝶阀-DeviceNet通讯界面规格
Valve unit |
Material | Body | 304S.S. (*1) |
Plate | 304S.S. (*1) |
Shaft | 304S.S. |
Gate seal | Viton |
Shaft seal | Viton |
Flange | KF、ISO、CF |
Mounting position | Any |
Cycles until first service | Pressure control | 2,000,000(*2) |
Closing / Opening | 250,000 |
Helium leak rate at 1 atm differential | < 1 x 10-9 mbar．l/sec |
Pressure range | 1 x 10-8 mbar to 1.2 bar |
Operating temperature | Body | 10°C to 110°C |
| Actuator | Step Motor |
Standard accessories | M12 Single-Ended Cordset, 5 Poles, Female (Straight) to Pigtail by CAN Bus,
2.0 meter in length.*1.(Can optional cable length) |
(*1) Body and Plate material can choose aluminum alloy.
(*2) The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)
(*3) If there is particle issue in the working condition of the valve , please clean the valve plate and body regularly and apply some vacuum grease on these parts.
Control and actuating unit |
Input voltage | +24 VDC (±10%) | connector: POWER |
Power consumption | 100W max. (Controller + Motor + Sensor + Power Failure) | connector: POWER |
Sensor power supply output | +24 VDC /+-15VDC, 500 mA | connector: SENSOR |
Analog input |
Q’ty of sensors | Independent 2 channel | connector: SENSOR |
Input voltage | 0-10V DC linear Physical quantity | connector: SENSOR |
Resolution | 12bit | 2.3 mV | connector: SENSOR |
24bit | 0.5 mV | connector: SENSOR |
Input resistance | Ri = 21 kΩ | connector: SENSOR |
Digital Input/ Output |
Input | Independent 2 channel | connector: INTERFACE |
Output | Independent 2 channel | connector: INTERFACE |
Ambient temperature | ≤ 70°C -24HR |
Control accuracy | 0.1% of maximum sensor range |
Backup power | Yes |
KF25,KF40,KF50,CF35 |
Closing time | <0.85sec |
Opening time | <0.85sec |
Valve max. torque | 50kg-cm |
Position resolution | 8000 (steps 0-90 rotation) |
ISO63, ISO80, ISO100, CF63, CF100 |
Closing time | <0.85sec |
Opening time | <0.85sec |
Valve max. torque | 50kg-cm |
Position resolution | 8000 (steps 0-90 rotation) |
ISO160, CF150 |
Closing time | <3.5sec |
Opening time | <3.5sec |
Valve max. torque | 90kg-cm |
Position resolution | 2400 (steps 0-90 rotation) |
Htc APC蝶阀是采用步进马达驱动的真空阀，密封板搭配O-ring的设计，可隔绝真空侧与大气侧，具有快速开闭、安装快速、尺寸小，寿命长等优点。
Htc APC蝶阀的密封设计，可应用在需隔絶具污染及腐蚀气体(依照SS304及Viton的Chemical resistance能力)制程中。
