此系列的微机械激光扫描镜分为1D和2D产品，即根据其其扫描轴为单轴或双轴而不同。此类微光机电光束扫描镜也被称为微扫描镜或者微光机电光束偏转器。
The mirror plate of the microscanner performs a continuous, harmonic oscillation. The oscillation is excited electrostatically and utilizes planar electrostatic comb drives. The oscillation-frequency has to be close to the natural frequency of the scanning axis. Adjusting the driving voltage or the driving frequency allows setting and controlling the
oscillation amplitude. For 2D devices, the mirror plate is gimbal-mounted. The resonance frequency of each axis is determined by design independently. Each axis is excited individually. Thus, the ratio of the oscillation amplitudes and the phase difference can be set and controlled arbitrarily.

Technical Properties

Mirror Motion	harmonic oscillation
Scan Frequencies	depending on configuration type and design parameters 100 Hz - 50 kHz
Drive Signal	A square wave voltage input signal is required which can be generated with standard laboratory equipment - a power supply unit is not in standard scope of delivery with VarioS®-microscanner-demonstrators. 1D- VarioS®-microscanner-demonstrators can be delivered with the Laser Deflection Cube as an option. Alternatively customer specific drive electronics and system designs can be delivered as result of a research and development project from Fraunhofer IPMS.
Amplitude	up to ±29° maximum mechanical deflection, amplitude controllable via electrode voltage and input pulse frequency
Drive Mode	electrostatic-resonant
Drive	planar comb electrodes with out-of plane motion
2D Axis Configuration	gimballed
Position Sensors	no position sensor integrated
Mirror Shape	circular
Mirror Diameter / 1D-Microscanner	0.5 - 3 mm
Mirror Diameter / 2D-Microscanner	0.5 - 2 mm
Mirror Reflectance	dependent on wavelength of light source, approx. 80-92% (see Fig. 1)for visible range
Chip Dimensions	5370 µm x 4540 µm