此系列产品为微镜阵列，即采用微光机电光束偏转镜组成的镜面整列。适用波长可从深紫外至近红外（DUV to NIR, 193nm~1500nm）。镜面可由256×256个微镜面组成，每个镜面为16um*16um。扫描频率可达1KHz。可用做图形的产生，可编程掩膜板等。

Example of micro mirror array for extended spectral range
„256 x 256 micro mirrors
„ 16 μm x 16 μm mirror pitch
„ Frame rate 1 kHz
„ Analogue mirror tilting
„ Illumination wavelengths : 193 … 1500 nm

Applications
„Pattern projection (real time grey levels)
„ Programmable masks
„ Structured / programmable illumination