MetOne 3400 系列气体减压阀-上海萨海测量技术有限公司手机版

详细介绍

MetOne 3400系列专用高压气体扩散器（减压阀）
高压气体经过 Diffuser (30~150 Psi) 调整至常压状态后再经由颗粒计数器读出目前气体中粒子分布情形，可量测范围0.1um-5um。应用于半导体厂、光电厂中高压气体如PN2、O2、H2、CDA等。

Specifications

Specifications are subject to change without notice.

Specification

Details

Dimensions (L x D)

19.1 x 5.7 cm (7.5 x 2.25 in.)

Material

Nickel-plated aluminum and stainless steel

Weight

0.57 kg (1.25 lb)

Pressure range

0.1 CFM, 1.0 CFM or 50 LPM diffuser: 206–1034 kPa (30–150 psig)
100 LPM diffuser: 344–1034 kPa (50–150 psig)

Flow rate

0.1 CFM, 1.0 CFM, 50 LPM or 100 LPM

Sample gas

Dry, inert and non-toxic

Inlet connector

Stainless #4 VCR fitting (modified)

Outlet connector

0.1 CFM diffuser: Stainless #4 VCR fitting (modified)
1.0 CFM or 50 LPM diffuser: 3/8-in. barb fitting
50 or 100 LPM diffuser: ½-in. barb fitting (for 3445 and older 342x units)

Orifice material

Sapphire (at the inlet end)

Exhaust port

¼-in. NPT

产品简介

详细介绍