类别

系列代码

波长范围nm

反射率

直径mm

面型精度

表面质量

损伤阈值

窄带部分反射镜

PR1

190-2100

30-90%

12.7-50.8

λ/10

10-5

20 J/cm2, 20ns, 20Hz   at 1064nm,
10 MW/cm2 at 1064nm

窄带可调全反镜

TLM1

190-2100

R ≥ 99.0% at 0°
R ≥ 98.5% at 45°, P-Pol
R ≥ 99.0% at 45°, UNP
R ≥ 99.5% at 45°, S-Pol

12.7-101.6

λ/10

10-5

20 J/cm2, 20ns, 20Hz   at 1064nm,
10 MW/cm2 at 1064nm

光纤全反镜

FLM

343, 515,

1030, 1064,
   1070, 1550nm

R ≥ 99.0% at 0°
R ≥ 99.0% at 45°, UNP

12.7-50.8

λ/10

10-5

20 J/cm2, 20ns, 20Hz   at 1064nm,
10 MW/cm2 at 1064nm

准分子全反镜

ARF

193

R ≥ 97% at 0°
R ≥ 96.0% at 45° UNP

25.4-76.2

λ/10

10-5

1 J/cm2, 20ns pulse at   193nm

KRF

248

R ≥ 99.5% at 0°
   R ≥ 99.0% at 45°, UNP

25.4-76.2

λ/10

10-5

3 J/cm2, 8ns pulse at   248nm

YAG全反镜

Y5

213

R ≥ 97.0% at 0°
R ≥ 97.0% at 45°, UNP

12.7-50.8

λ/10

10-5

3 J/cm2, 8ns pulse at 248nm

Y4

262-266

R ≥ 99.9% at 0°
R ≥ 99.6% at 45°, P-Pol
R ≥ 99.8% at 45°, UNP
R ≥ 99.9% at 45°, S-Pol

12.7-101.6

λ/10

10-5

10 J/cm2, 20ns, 20Hz   at 266nm

Y3

349-355

R ≥ 99.9% at 0°
R ≥ 99.6% at 45°, P-Pol
R ≥ 99.8% at 45°, UNP
R ≥ 99.9% at 45°, S-Pol

12.7-101.6

λ/10

10-5

15 J/cm2, 20ns, 20Hz   at 355nm

Y2

523-532

R ≥ 99.9% at 0°
R ≥ 99.6% at 45°, P-Pol
R ≥ 99.8% at 45°, UNP
R ≥ 99.9% at 45°, S-Pol

12.7-101.6

λ/10

10-5

20 J/cm2, 20ns, 20Hz   at 532nm

Y1

1047-1064

R ≥ 99.9% at 0°
R ≥ 99.6% at 45°, P-Pol
R ≥ 99.8% at 45°, UNP
R ≥ 99.9% at 45°, S-Pol

12.7-101.6

λ/10

10-5

25 J/cm2, 20ns, 20Hz   at 1064nm

Y1S, Y2S, Y3S, Y4S

266, 355,

532, 1064

R ≥ 99.9% at 0°
R ≥ 99.9% at 45°, P-Pol
R ≥ 99.9% at 45°, S-Pol

25.4

λ/10

10-5

40 J/cm2, 20ns, 20Hz   at 1064nm

双波长反射镜

HM

1064/532

R ≥ 99% at 1064 and   532nm

12.7-50.8

λ/10

10-5

8 J/cm2, 20ns, 20Hz at   1064nm,
3 J/cm2, 20ns, 20Hz at 532nm

YH

1064/633

R ≥ 99% at 1064nm
R ≥ 80% at 633nm

25.4-50.8

λ/10

10-5

8 J/cm2, 20ns pulse at   1064nm

宽带反射镜

TLM2

450nm to 2100nm

R > 99.5% at 0° incidence
R >99.0% at 45° incidence

12.7-25.4

λ/10

10-5

500 mJ/cm2, 20ns, 20Hz   at 1064nm

MPQ

245 – 390 (UV)
   420 – 700 (VIS)

Ravg≥ 98% from 245 – 390nm at 0° - 45°
Ravg≥ 98% from 420 – 700nm at   0° - 45°

25.0

λ/4

60-40

0.5 J/cm2, 10ns at   532nm

钛宝石超快反射镜

TLMB

740 – 860

R > 99.0% from 740 – 860nm

25.0-101.6

λ/10

40-20

8 J/cm2, 300 ps, 20Hz   at 800nm

金属镀膜反射镜

VUVA

157 – 190

R > 85% at 157nm by   design

25.4-50.8

λ/10

40-20

低功率应用

DUVA

193 – 1200

R > 90% at 193nm
Ravg≥   85% at 400 – 1200nm

12.7-50.8

λ/10

40-20

PAUV

250 – 600

Ravg ≥ 85% (250 – 600nm)

12.7-76.2

λ/10

40-20

PAV

400 – 800

Ravg ≥ 87% (400 – 800nm)

12.7-76.2

λ/10

40-20

EAV

450 – 650

Ravg ≥ 92% (450 – 650nm)

12.7-76.2

λ/10

40-20

PS

400 – 20,000

Ravg ≥ 95% (400nm to   20 µm)

12.7-76.2

λ/10

40-20

PG

650 – 20,000

Ravg ≥ 95.5% (650 – 1700nm)
Ravg ≥ 98.0% (2 – 16 µm)

12.7-76.2

λ/10

40-20