Helios 6 HD FIB-SEM benefits

FIB-SEM availability 

Optimal utilization is required to minimize operating costs. The Helios 6 HD FIB-SEM maximizes system utilization with its new Osprey FIB column, featuring automated source and column alignments that reduces the need for operator and service technician intervention. Additionally, the new Thermo Scientific EasyLift NanoManipulator streamlines the needle change procedure and minimizes costly production interruptions. 

TEM sample preparation throughput 

The Helios 6 HD FIB-SEM features Thermo Scientific AutoTEM 6 Software, which performs automated alignments and enhances grid management for faster setup. An all-new digital scan engine allows simultaneous SEM imaging and milling while also providing precise scan rotation and accurate pattern positioning. This combination of hardware and software innovations provides a greater than 15% increase in the number of site-specific samples per hour compared with existing systems. 

TEM sample quality 

Sample success rate and quality are of paramount importance, regardless of the type of sample or the sample complexity. Failure analysis labs are expected to deliver high-quality TEM data from every metrology or defect analysis sample. 

The Helios 6 HD FIB-SEM contains a new digital scan engine and FIB-SEM control architecture, which provides manual or semi-automated end-pointing for precise isolation of the feature of interest within the sample. In addition, the new Osprey FIB column provides improved low-kV milling. These features combine to deliver high-quality TEM samples, to help you answer the most challenging analysis questions. 

Learn more about semiconductor TEM imaging and analysis ›