Vacuum Degree 2.0 x 10-2torr Ion Current 1 to 10mA (1mA/step) Target Material Au or Pt Chamber Size Φ140mm(D) x 100mm(H) Sample Stage Φ50mm(D) x 30mm(H) Target Size Φ50mm(D) x 0.1(T) Sputter Time 1 to 600sec (1sec/step) Vacuum Pump 100L/min, Rotary Pump (Recommended) Dimension 380(W)x 240(L) x 250(H)mm, 10kg