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NORDSON MARCH AP-1000Plasma System
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详细信息
Nordson AP-1000 Plasma System Features： |
PLC controller with touch screen provides an intuitive graphical interface and real time process representation |
Flexible shelf architecture allows processing of a wide variety of part carriers in either direct or downstream plasma mode |
13.56 MHz RF generator has automatic impedance matching for unparalleled process reproducibility |
Proprietary software control system generates process and production data for statistical process control |
Nordson AP-1000 Plasma System Benefits： |
Uniform plasma treatment for the most demanding production environments
The Nordson MARCH AP-1000 system is designed to meet the rigorous demands of 24-hour operation in high performance manufacturing environments. The system delivers uniform plasma treatment with unmatched reliability, safety and ease of operation.
The AP-1000 system is completely self-contained, requiring minimal floor space. The pump, chamber, control electronics, and 13.56 MHz RF generator are housed in a single enclosure. Full front access allows for convenient access to all interior components. The pump is positioned on rollers for easy removal.
The plasma chamber is constructed of 11-gauge stainless steel with aluminum fixtures for superior durability. The chamber has multiple removable and adjustable shelves to accommodate a range of part carriers, including magazines, trays, wafer and Auer® boats.
Enhanced productivity for high-volume capacity requirements
The AP-1000 system with optional HTP (high throughput) shelves combines the reliability and process quality of the AP-1000 system with the proven benefits of Nordson MARCH’s unique shelf design. The AP- 1000 HTP system optimizes use of the reactive ions found in RF plasma, increasing treatment uniformity while decreasing process time.
The AP-1000 HTP system allows selection from a range of process gases such as Argon, Hydrogen and Helium. It comes standard equipped with four mass flow controllers for optimal gas control. Slotted magazines are placed vertically inside the chamber.
Additionally, slotted magazines can be placed vertically inside the chamber. Typically, each magazine holds a minimum of 20 lead frames. The AP-1000 plasma chamber can hold up to 12 magazines, depending on magazine size.
Nordson AP-1000 Plasma System Specifications： |
Enclosure Dimensions | W x D x H – Footprint | 680W x 1127D x 1890H (26.77W x 62.3D x 74.4H in.) |
Net Weight | 485 kg (1069 lbs) | |
Equipment Clearance | Right, Left – 153 mm (6 in.), Front-680 mm (27 in.) Back-483 mm (19 in.) min. | |
Chamber | Maximum Volume | 127 liters (7774 in³) |
Variable Electrode Configurations | Power-Ground, Ground-Power, Power-Power | |
Number of Electrode Positions | 14 | |
Electrode Pitch | 25.4 mm (1 in.) for 600 W 50.8 mm (2 in.) for 1000 W | |
Electrodes | Powered Working Area | 349W x 425D mm (13.74W x 16.73D in.) |
Ground/Perforated Working Area | 384W x 425D mm (15.12W x 16.73D in.) | |
Floating Working Area | 349W x 425D mm (13.74W x 16.73D in.) | |
RF Power | Standard Wattage | 600 W |
Optional Wattage | 1000 W | |
Frequency | 13.56 MHz | |
Gas Control | Available Flow Volumes | 10, 25, 50, 100, 250, 500, 1000, 2000 or 5000 sccm |
Maximum Number of MFCs | 4 | |
Control &Interface | Software Control | PLC Control with Touch Screen Interface |
Remote Interface | PlasmaLINK, ProcessLINK, SECS/GEM | |
Vacuum Pump | Standard Wet Pump | 53 cfm with Oxygen Oil Mist Eliminator |
Optional Wet Pump | 53 cfm with Corrosive Oil Mist Eliminator | |
Optional Purged Dry Pump | 63 cfm | |
N2 Purged Pump Flow | 14 slm | |
Cooling Water Purged Pump Flow | 5 slm | |
Facilities | Power Supply | 220 V, 25 A, 50/60 Hz, 3-Phase, 8 AWG, 4-Wire;380 V, 25 A, 50/60 Hz, 3-Phase, 8 AWG, 5-Wire |
Process Gas Fitting Size & Type | 6.35 mm (0.25 in.) OD Swagelok Tube | |
Process Gas Purity | Lab or Electronic Grade | |
Process Gas Pressure | 0.69 bar (10 psig) min. to 1.03 bar (15 psig) max., regulated | |
Purge Gas Fitting Size & Type | 6.35 mm (0.25 in.) OD Swagelok Tube | |
Purge Gas Purity | Lab or Electronic Grade N2/CDA | |
Purge Gas Pressure | 2 bar (30 psig) min. to 6.9 bar (100 psig) max., regulated | |
Pneumatic Valves Fitting Size & Type | 6.35 mm (0.25 in.) OD Swagelok Tube | |
Pneumatic Gas Purity | CDA, Oil Free, Dewpoint ≤7°C(45°F), Particulate Size<5 µm | |
Pneumatic Gas Pressure | 3.45 bar (50 psig) min. to 6.89 bar (100 psig) max.,regulated | |
Exhaust | 38 mm (1.5 in.) OD Pipe Flange | |
Compliance | SEMI | S2/S8 (EH&S/Ergonomics) |
International | CE Marked | |
Ancillary Equipment | Gas Generators | Nitrogen, Hydrogen (Requires Additional Non-Optional Hardware) |
Facilities | Chiller, Scrubber |
