Verifire™ XL 激光干涉仪是一个独立的工作站，设计用于直径达12英寸（300毫米）的大型平面的简单可靠计量。示例包括前表面反射器，窗口和半导体晶片或晶片卡盘。

这种集成的系统易于使用，具有重型倾斜/倾斜平台，可提供可重复的零件放置，无需定制夹具。

Verifire™ XL 激光干涉仪外形紧凑，内置隔振，需要最小的生产空间。

振动稳健

Verifire XL系统包括ZYGO的QPSI™采集技术，可在存在振动的情况下进行可靠的高精度测量。QPSI可实现真正的轴上表面形状测量，而不会降低典型的生产振动。

准确的计量

Verifire XL系统中的高性能变速箱平面设计用于对重力下垂的最小灵敏度，并包括一个全区域校准文件，以实现系统精度。
Mx™软件

ZYGO专有的Mx™测量和分析软件提供广泛的操作功能和数据可视化工具，可在易于使用的界面中实现的测量功能。

MX软件现在包括SmartAveraging®技术，可帮助获得在最短的时间量测量，以及内置的SPC提供了强大的能力进行生产的情况。

主要特点：

•12“（300mm）光圈

•紧凑的占地面积，独立系统

•易于零件装载和对齐

•简单的设置和简化的操作

•内置预对准传输平面

•集成的隔振和QPSI™技术，可在生产环境中进行可靠的测量



 

Large-Aperture Downward-Looking Interferometer Workstation

The Verifire™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.

This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation, requires minimal production floor space.

Vibration Robust

The Verifire XL system includes ZYGO's patented QPSI™ acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true on-axis surface form metrology, without degradation from typical production vibrations.

Accurate Metrology

The high-performance transmission flat in the Verifire XL system is designed for minimal sensitivity to gravitational sag, and includes a full-area calibration file to enable optimum system accuracy.

Mx™ Software

ZYGO's proprietary Mx™ measurement and analysis software offers a wide range of operational features and data visualization tools for unmatched measurement capability in an easy-to-use interface. Mx software now includes SmartAveraging®technology that helps to obtain the best possible measurement in the shortest amount of time, and the built-in SPC provides powerful capability for production situations.