品牌
其他厂商性质
所在地
| 低温泵型号 | CP-8 | CP-8LP | CP-250LP | CP-12 | CP-16 | CP-20 | SICERA 8' | SICERA 12' | |
| 抽速(升/秒) | 空气 | 1500 | 1800 | 3060 | 3600 | 4800 | 9700 | 1500 | 3300 |
| 水蒸汽 | 4200 | 4200 | 6300 | 9860 | 17300 | 29100 | 4000 | 9500 | |
| 氩气 | 1250 | 1500 | 2500 | 3100 | 4100 | 8300 | 1200 | 2700 | |
| 氢气 | 2300 | 3000 | 5000 | 7300 | 12000 | 14000 | 2200 | 6000 | |
| 吞吐量 | 氩气(托-升/秒) | 11 | 11 | 11 | 12.6 | 11.4 | 1.3 | 8.9 | 8.9 |
| 氩气(sccm) | 870 | 870 | 870 | 1000 | 900 | 900 | 700 | 700 | |
| 吸附能力(标升) | 氩气@ 1 x 10-6 托 | 1200 | 1600 | 1600 | 3100 | 5500 | 6000 | 1000 | 2000 |
| 氢气@ 5 x 10-6托 | 25 | 25 | 25 | 50 | 50 | 33 | 12 | 30 | |
| Crossover (托-升) | 220 | 220 | 220 | 650 | 500 | 400 | 150 | 150 | |
| 降温时间 (分钟) | 75 | 110 | 110 | 90 | 135 | 190 | 120 | 150 | |
| 接口法兰 | ANSI | 6' | 6' | N/A | 10' | N/A | 20' | N/A | N/A |
| ISO | 200 mm | 200 mm | 250 mm | 320 mm | 400 mm | 500 mm | N/A | N/A | |
| Metal Seal (Conflat) | 10' | 10' | N/A | N/A | N/A | N/A | 253 mm | ||
| CVC | N/A | N/A | N/A | 10' | 10' | N/A | N/A | N/A | |
