ArisMD主动减震台/主动隔振台

电子显微镜主动减震台，FIB系统主动隔振台，半导体设备主动减震台，干涉仪主动隔振台，轮廓仪主动减震台，EBL电子束曝光机主动隔振台。

Description

Compact modular active vibration isolation systems counteract vibrations affecting high-precision equipment and tools.Stationedon multiple independent isolators ArisMD has the capacity to support load of massive machines up to 4000kg. Low Profile isolators provides simple installation which does not require microscope lifting and recalibration.

Products Spec

1. Patented Architecture

2. Highly Damped Step Respond

3. Power and Communication Box for centralized control

4. Application-specific designs/products/ capabilities to meet your needs

5. Ability to support massive machines, tools,systems

Active Isolation Range	0.5 – 100 Hz
Degrees of Freedom	All 6 degree for System
Vibration Isolation  Performance	~8db gain on 1Hz ~20db gain on 2Hz
Settling time	≤0.1 sec
Actuator Force	Vertical: 80 N; Horizontal 40 N
Real-TimeDiagnostic  Tools	Built-in Real-Time 2xChannels Oscilloscope, Real Time 2xChannel Spectrum Analyzer per Module and per  System
Real-Time performance  adjustment	Adaptive Control in ALL degrees of freedom in real-time. Remote Access
Input Voltage	AC 80-260V/50-60Hz
Transmission Chart

Industry fields and Applications

Vibration levels should meet the specs of sensitive tools and instruments. Mostly the Fabs, Laboratories and Cleanrooms floors often fail to meet the target devicespec.

Using K&S Devices for new Fabs, Laboratories and Clean rooms reducing overall cost, meet specs, providing ultimate vibration and adaptive vibration isolation for sensitive tools and instruments could be adjusted to changed environmental conditions.

1.  Big heavy floor microscopes – SEM,TEM

2.  Semiconductor equipment

3.  X-Ray, CT,MRI 

Installation comparisopn of ARisMDxxx systems versus another approaches

Competitive approach for installation vibration isolation systems

KNS Approach

Key Benefits

1. No need to lift precisiontool/instrument-K&S solution is very low profile,which easily integrating under the tool frame.

2. No need to reconfigure the tool after isolation - save additional configuration cost and time.
3. No need for heavy mechanical equipment and construction adaptations.
4. Shortest installation time - only few single hours for installation.
5. Very low installation cost.
6. Improves tools/instruments performance and quality.
7. Easy Integrates into tool/instrument workstation environment.

关联产品：ARISTT桌上型主动隔震台（详情可点击图片了解，或致电至一科技咨询）